Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor
نویسندگان
چکیده
منابع مشابه
Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage
High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relativ...
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ژورنال
عنوان ژورنال: Journal of Sensors
سال: 2014
ISSN: 1687-725X,1687-7268
DOI: 10.1155/2014/926314